Secondary Ion Mass Spectrometry (SIMS)

Elemental and Molecular Depth Profiling, Chemical Mapping and Spectrometry 
 

Spreading Resistance Profiling (SRP)

Depth Profiling of electrically active (n-type and p-type) dopants

 

X-Ray Photoelectron  Spectroscopy (XPS)
Quantitative Surface Analysis, “Chemical state” Information and Depth Profiling

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Auger Electron Spectroscopy (AES)
Small area Defect or Particle Analysis 

 

Transmission Electron Microscopy (TEM)

Microstructure, Layer Thickness and Interfacial  Defects Analysis

 

X-Ray Diffraction Analysis (XRD)
Crystalline Information and Phase Determination

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Atomic Force Microscopy (AFM)

Surface Roughness Measurements

 

Rutherford Backscattering Spectrometry (RBS)
Quantitative Composition of Films and Coatings 

 

Elastic Recoil Detection Analysis (ERDA)

Quantitative Analysis of Light Elements including Hydrogen

 

Glow Discharge Mass Spectroscopy (GDMS)

Trace Element Analysis of Inorganics in Materials 

 

Vapour Phase Decomposition ICP-MS (VPD-ICP-MS)

Trace Element Impurity Measurements on Wafers

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Total X-Ray Fluorescence analysis  (TXRF)

Trace Element Impurities including mapping        

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