Preparation

 Detection Limits 

VPD-ICPMS.jpg

Droplet  analysed by TXRF or ICP-MS  

  Applications of VPD-ICP-MS and TXRF
  • Environmental Control 

  • Process Monitoring

  • Measurements of Ultra Low Levels of Metallics 

  • Mobile Species & Nobel Metals

  • Oxide , PSG,  BPSG,  and  Nitrides 

  • Partial or Full Wafer Scans