FIB Preparation of lamella for TEM analysis 

   TEM Image of Si/ SiOxide 

  Applications of TEM  

  • Microstructure & Defects

  • Layer Thickness Measurements.

  • Chemical Mapping ( with EELS).

  • Failure Analysis

  • Reverse Engineering

  • Silicon , III/V and II/IV Materials

  • Coatings , Particles , Fibers 

Silicon

10 nm

Oxide

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