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VPD Preparation

 Detection Limits 

Droplet  analysed by TXRF or ICP-MS  

  Applications of VPD-ICP-MS and TXRF
  • Measurements of Ultra Low Levels of Metallics 

  • Mobile Species & Nobel Metals

  • Oxide , PSG,  BPSG,  and  Nitrides 

  • Partial or Full Wafer Scans

  • Environmental Control 

  • Process Monitoring