VPD Preparation

 Detection Limits 

Droplet  analysed by TXRF or ICP-MS  

  Applications of VPD-ICP-MS and TXRF​

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• Measurements of Ultra Low Levels of Metallics 

• Mobile Species & Nobel Metals

• Oxide , PSG,  BPSG,  and  Nitrides 

• Partial or Full Wafer Scans

• Environmental Control 

• Process Monitoring