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VPD Preparation

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Droplet  analysed by TXRF or ICP-MS  

  Applications of VPD-ICPMS and TXRF​
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  • Measurements of Ultra Low Levels of Inorganic Contaminants 

  • Mobile Species & Noble Metals

  • Oxide , PSG,  BPSG and  Nitride 

  • Partial or Full Wafer Scan 

  • Edge Exclusion or Bevel Analysis 

  • Environmental Control 

  • Process Monitoring

 VPD ICPMS Detection Limits 

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