Key Applications of VPD-ICPMS and TXRF​

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• Measurements of Ultra Low Levels of Inorganic Contaminants 

• Mobile Species & Noble Metals

• Oxide , PSG,  BPSG and  Nitride 

• Partial or Full Wafer Scan 

• Edge Exclusion and  Bevel Analysis

• TXRF Full Wafer Mapping, 150, 200 and 300 mm wafers  

• Clean room environmental control 

• Process Monitoring