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Surface Analysis Techniques 


Secondary Ion Mass Spectrometry (SIMS)

Elemental and Molecular Depth Profiling, Chemical Mapping and Spectrometry 

Spreading Resistance Profiling (SRP)

Depth Profiling of electrically active (n-type and p-type) dopants


X-Ray Photoelectron  Spectroscopy (XPS)
Quantitative Surface Analysis, “Chemical state” Information and Depth Profiling

Auger Electron Spectroscopy (AES)
Small area Defect or Particle Analysis 


Transmission Electron Microscopy (TEM)

Microstructure, Layer Thickness and Interfacial  Defects Analysis


X-Ray Diffraction Analysis (XRD)
Crystalline Information and Phase Determination

Atomic Force Microscopy (AFM)

Surface Roughness Measurements


Rutherford Backscattering Spectrometry (RBS)
Quantitative Composition of Films and Coatings 


Elastic Recoil Detection Analysis (ERDA)

Quantitative Analysis of Light Elements including Hydrogen


Glow Discharge Mass Spectroscopy (GDMS)

Trace Element Analysis of Inorganics in Materials 


Vapour Phase Decomposition ICP-MS (VPD-ICP-MS)

Trace Element Impurity Measurements on Wafers

Total X-Ray Fluorescence analysis  (TXRF)

Trace Element Impurities including mapping        

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