Surface Analysis Techniques

Secondary Ion Mass Spectrometry (SIMS)
Elemental and Molecular Depth Profiling, Chemical Mapping and Spectrometry
Spreading Resistance Profiling (SRP)
Depth Profiling of electrically active (n-type and p-type) dopants
X-Ray Photoelectron Spectroscopy (XPS)
Quantitative Surface Analysis, “Chemical state” Information and Depth Profiling
Auger Electron Spectroscopy (AES)
Small area Defect or Particle Analysis
Transmission Electron Microscopy (TEM)
Microstructure, Layer Thickness and Interfacial Defects Analysis
X-Ray Diffraction Analysis (XRD)
Crystalline Information and Phase Determination
Atomic Force Microscopy (AFM)
Surface Roughness Measurements
Rutherford Backscattering Spectrometry (RBS)
Quantitative Composition of Films and Coatings
Elastic Recoil Detection Analysis (ERDA)
Quantitative Analysis of Light Elements including Hydrogen
Glow Discharge Mass Spectroscopy (GDMS)
Trace Element Analysis of Inorganics in Materials
Vapour Phase Decomposition ICP-MS (VPD-ICP-MS)
Trace Element Impurity Measurements on Wafers
Total X-Ray Fluorescence analysis (TXRF)
Trace Element Impurities including mapping