Secondary Ion Mass Spectrometry (SIMS)

Elemental and Molecular Depth Profiling, Chemical Mapping and Spectrometry 
 

Spreading Resistance Profiling (SRP)

Depth Profiling of electrically active (n-type and p-type) dopants

 

X-Ray Photoelectron  Spectroscopy (XPS)
Quantitative Surface Analysis, “Chemical state” Information and Depth Profiling

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Rutherford Backscattering Spectrometry (RBS)
Quantitative Composition of Films and Coatings 

 

Time of Flight Elastic Recoil Detection  (TOF ERDA)

Quantitative Depth Profiling  including Hydrogen

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Glow Discharge Mass Spectroscopy (GDMS)

Trace Element Analysis of Inorganics in Materials 

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Vapour Phase Decomposition ICP-MS (VPD-ICP-MS)

Trace Element Impurity Measurements on Wafers

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Total X-Ray Fluorescence analysis  (TXRF)

Trace Element Impurities including mapping        

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Transmission Electron Microscopy (TEM)

Microstructure, Layer Thickness and Interfacial  Defects Analysis
 

X-Ray Diffraction Analysis (XRD)
Crystalline Information and Phase Determination

 

Atomic Force Microscopy (AFM)

Surface Roughness Measurements