Surface Analysis Techniques

Analytical Detection Limtits

Secondary Ion Mass Spectrometry (SIMS)
Elemental and Molecular Depth Profiling, Chemical Mapping and Spectrometry
Spreading Resistance Profiling (SRP)
Depth Profiling of electrically active (n-type and p-type) dopants
X-Ray Photoelectron Spectroscopy (XPS)
Quantitative Surface Analysis, “Chemical state” Information and Depth Profiling
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Rutherford Backscattering Spectrometry (RBS)
Quantitative Composition of Films and Coatings
Elastic Recoil Detection Analysis (ERDA)
Quantitative Analysis of Light Elements including Hydrogen
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Glow Discharge Mass Spectroscopy (GDMS)
Trace Element Analysis of Inorganics in Materials
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Vapour Phase Decomposition ICP-MS (VPD-ICP-MS)
Trace Element Impurity Measurements on Wafers
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Total X-Ray Fluorescence analysis (TXRF)
Trace Element Impurities including mapping
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Transmission Electron Microscopy (TEM)
Microstructure, Layer Thickness and Interfacial Defects Analysis
X-Ray Diffraction Analysis (XRD)
Crystalline Information and Phase Determination
Atomic Force Microscopy (AFM)
Surface Roughness Measurements