Applications of  Depth Profiling SIMS (DSIMS)  

• Layer Composition  

• Dopant Diffusion Profiling

• Dose Measurements 

• Impurity and Contamination assessment

• Junction Depth 

• Ultra low DL (1E16 at/cc) of  gaseous impurities (O, N, C and H)

• Reverse Engineering
  ( Also see SRP Analysis )

   Materials 

• Si , SiGe , SiC

• PSG , BPSG , Oxides , Nitrides

• GaAs, AlGaAS, InP, AlInP

• GaN , InGaN, AlGaN , AlN, Diamond