Schematic of TOF SIMS
Applications of TOF SIMS
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Surface and interface contamination
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High resolution Chemical Mapping
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Small area Depth Profiling
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3-D Mapping and depth profiling
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Organic depth profiling
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Large area chemical mapping
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Retrospective X-section Image reconstruction and Spectra
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Reverse Engineering
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Pulsed Bi source for data acquisition
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Cs and O for sputtering : Inorganic Depth Profiling
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Ar cluster for sputtering : Organic Depth Profiling