Schematic of TOF SIMS 

  Applications of TOF SIMS 
  • Surface and  interface contamination 

  • High resolution Chemical Mapping 

  • Small area Depth Profiling

  • 3-D Mapping and depth profiling 

  • Organic depth profiling

  • Large area chemical mapping

  • Retrospective X-section Image reconstruction and Spectra

  • Reverse Engineering 

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  • Pulsed Bi source for data acquisition  

  • Cs and O for sputtering : Inorganic Depth Profiling

  • Ar cluster for sputtering : Organic Depth Profiling 

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