Schematic of TOF SIMS 

  Applications of TOF SIMS 

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• Surface and  interface contamination 

• High resolution Chemical Mapping 

• Small area Depth Profiling

• 3-D Mapping and depth profiling 

• Organic depth profiling

• Large area chemical mapping

• Retrospective X-section Image reconstruction and Spectra

• Reverse Engineering 

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• Pulsed Bi source for data acquisition  

• Cs and O for sputtering : Inorganic Depth Profiling

• Ar cluster for sputtering : Organic Depth Profiling